| Call Number | 13749 |
|---|---|
| Day, Time & Location | View Class Schedule & Location in Vergil |
| Points | 3 |
| Grading Mode | Standard |
| Approvals Required | None |
| Instructor | Siu-Wai Chan |
| Type | LECTURE |
| Method of Instruction | In-Person |
| Course Description | Vacuum basics, deposition methods, nucleation and growth, epitaxy, critical thickness, defects properties, effect of deposition procedure, mechanical properties, adhesion, interconnects, and electromigration. |
| Department | Applied Physics and Applied Mathematics |
| Enrollment | 0 students (35 max) as of 9:06PM Wednesday, October 14, 2026 |
| Subject | Materials Science and Engineering |
| Number | E6251 |
| Section | 001 |
| Division | School of Engineering and Applied Science: Graduate |
| Open To | Engineering:Undergraduate, Engineering:Graduate, GSAS |
| Section key | 20271MSAE6251E001 |